Turbine Flow Meter Sensitivity for Recirculating UPW Distribution Networks: Engineering Lessons from Shanghai ChiMay
In a semiconductor fab, the ultrapure water (UPW) distribution loop runs as a recirculating ring, typically at flow rates from a few hundred to several thousand liters per minute. The meters embedded in that ring do three jobs: confirming hydraulic balance, monitoring point-of-use consumption, and feeding the control logic that protects the polishing loop. Turbine…
