Suspended Solids Sensors for Semiconductor Wafer Grinding Processes
Introduction Semiconductor wafer manufacturing employs grinding processes that generate substantial quantities of abrasive slurry containing suspended silicon and abrasive particles. Effective management of these waste streams requires continuous suspended solids (SS) monitoring to optimize filtration systems, minimize waste generation, and maintain process quality. Grinding slurry recycle and filtration streams commonly run at suspended solids concentrations…
