High-Purity Water Conductivity Monitoring for Semiconductor Cleaning Processes
Introduction Water is the universal solvent, and in a fab even parts-per-trillion contamination can kill a nanoscale device structure. That is why ultra-pure water (UPW) systems are engineered to the limits of what is measurable—and why conductivity, the primary indicator of ionic purity, gets monitored obsessively from pretreatment all the way to point-of-use. Semiconductor capital…
